<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Semiconductor devices, physics and technology</title>
  </titleInfo>
  <name type="personal">
    <namePart>Sze, S. M.</namePart>
    <namePart type="date">1936-</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Lee, M. K. (Ming-Kwei)</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">nju</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Hoboken,  N.J</placeTerm>
    </place>
    <publisher>Wiley</publisher>
    <dateIssued>2012</dateIssued>
    <edition>3rd ed.</edition>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>ix, 578 p. : ill. ; 27 cm.</extent>
  </physicalDescription>
  <abstract>"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices"--</abstract>
  <tableOfContents>Machine generated contents note: CHAPTER 0 IntroductionCHAPTER l Energy Bands and Carrier Concentration in Thermal EquilibriumCHAPTER 2 Carrier Transport PhenomenaCHAPTER 3 p-n junctionCHAPTER 4 Bipolar Transistor and Related DevicesCHAPTER 5 MOS Diode and MOSFETCHAPTER 6 Advanced MOSFET and Related DevicesCHAPTER 7 MESFET and Related DevicesCHAPTER 8 Microwave Diodes, Quantum-Effect, and Hot-Electron DevicesCHAPTER 9 LEDs and LasersCHAPTER 10 Photo detectors and Solar CellsCHAPTER 11 Crystal Growth and EpitaxyCHAPTER 12 Film FormationCHAPTER 13 Lithography and EtchingCHAPTER 14 Impurity DopingCHAPTER 15 Integrated Devices.</tableOfContents>
  <note type="statement of responsibility">S.M. Sze, M.K. Lee.</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
  </subject>
  <subject authority="bisacsh.">
    <topic>TECHNOLOGY &amp; ENGINEERING / Electronics / Semiconductors</topic>
  </subject>
  <classification authority="lcc">TK7871.85 .S9883 2012</classification>
  <classification authority="ddc" edition="22">621.3815/2</classification>
  <classification authority="bisacsh">TEC008090</classification>
  <identifier type="isbn">9780470537947 (hardback)</identifier>
  <identifier type="lccn">2011014262</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">DLC</recordContentSource>
    <recordCreationDate encoding="marc">110401</recordCreationDate>
    <recordChangeDate encoding="iso8601">20180515152638.0</recordChangeDate>
    <recordIdentifier source="KE-MeUCS">16717164</recordIdentifier>
  </recordInfo>
</mods>
