@book{90992,
	author = {Choy, Kwang-Leong,},
	title = {Chemical vapour deposition (CVD)},
	publisher = {CRC Press/Taylor & Francis Group,},
	year = {2018.},
	series = {Series in materials science and engineering ;},
	address = {Boca Raton, FL :},
	edition = {First edition.},
	url = {https://www.taylorfrancis.com/books/9780429342363}
}